Electron-beam charging of polytetrafluoroethylene
β Scribed by D. N. Sadovnichii; A. P. Tuytnev; Yu. M. Milekhin
- Book ID
- 110164698
- Publisher
- SP MAIK Nauka/Interperiodica
- Year
- 2008
- Tongue
- English
- Weight
- 284 KB
- Volume
- 42
- Category
- Article
- ISSN
- 0018-1439
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Polytetrafluoroethylene (PTFE) was subjected to 1 MeV electron beam irradiation in air. The thermal stability and the degradation fragments of the irradiated polymer were studied in dependence on the radiation dose up to 4 MGy by thermogravimetric analysis coupled with mass spectrometry. The TGA res
Charging effect becomes a more serious issue when performing electron beam lithography using high beam current. Here we studied the charging effect using PMMA, PMGI and ZEP-520A resist to pattern 200 nm period hole array. It is found that charging effect can be reduced by simply re-arranging the exp