✦ LIBER ✦
Electron beam-assisted growth of ultrathin silicon oxynitride films on Si(100) at moderate temperatures: in situ determination of composition and gap width
✍ Scribed by P. Poveda; A. Glachant
- Publisher
- Elsevier Science
- Year
- 1995
- Tongue
- English
- Weight
- 305 KB
- Volume
- 28
- Category
- Article
- ISSN
- 0167-9317
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