Electron and ion radiation damage of a-C:H films detected by energy loss spectroscopy of reflected and transmitted electrons

✍ Scribed by A. Fuchs; K. Jung; H. Ehrhardt; I. Mühling; K. Breuer

• Publisher: Elsevier Science
• Year: 1992
• Tongue: English
• Weight: 694 KB
• Volume: 217
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/0040-6090(92)90604-a