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Electron and ion beam induced heating effects in solids measured by laser interferometry

✍ Scribed by J. Kempf; M. Nonnenmacher; H. H. Wagner


Publisher
Springer
Year
1993
Tongue
English
Weight
589 KB
Volume
56
Category
Article
ISSN
1432-0630

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## Abstract Energetic beams of electrons and ions are widely used to probe the microscopic properties of materials. Irradiation with charged beams in scanning electron microscopes (SEM) and focused ion beam (FIB) systems may result in the trapping of charge at irradiation induced or pre‐existing de