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Electromigration of Cu and Ti atoms and dopant junction profiles in the p+-Si implanted channel under high-density current

✍ Scribed by H.H. Lin; S.L. Cheng; L.J. Chen


Book ID
104420516
Publisher
Elsevier Science
Year
2001
Tongue
English
Weight
177 KB
Volume
4
Category
Article
ISSN
1369-8001

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