Electromigration in single-crystal aluminum lines with fast diffusion paths made by nanoindentation

✍ Scribed by Young-Chang Joo; S.P. Baker; E. Arzt

• Book ID: 108492161
• Publisher: Elsevier Science
• Year: 1998
• Tongue: English
• Weight: 437 KB
• Volume: 46
• Category: Article
• ISSN: 1359-6454
• DOI: 10.1016/s1359-6454(97)00427-8