Electromigration damage in mechanically deformed Al conductor lines: dislocations as fast diffusion paths

✍ Scribed by S.P. Baker; Young-Chang Joo; M.P. Knauß; E. Arzt

• Publisher: Elsevier Science
• Year: 2000
• Tongue: English
• Weight: 429 KB
• Volume: 48
• Category: Article
• ISSN: 1359-6454
• DOI: 10.1016/s1359-6454(00)00024-0