✦ LIBER ✦
Electrolyzed Water as the Novel Cleaning Media in Ultra-Large-Scale Integration and Liquid-Crystal Display Manufacturing
✍ Scribed by Yamanaka, Koji; Imaoka, Takashi; Futatsuki, Takashi; Yamashita, Yukimari; Mitsumori, Ken-ichi; Kasama, Yasuhiko; Aoki, Hidemitsu; Yamasaki, Shinya; Aoto, Nahomi
- Book ID
- 119950888
- Publisher
- American Chemical Society
- Year
- 1999
- Tongue
- English
- Weight
- 155 KB
- Volume
- 15
- Category
- Article
- ISSN
- 0743-7463
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