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Electrodeposition of copper into trenches from a citrate plating bath

✍ Scribed by F.I. Lizama-Tzec; L. Canché-Canul; G. Oskam

Book ID: 113596368
Publisher: Elsevier Science
Year: 2011
Tongue: English
Weight: 762 KB
Volume: 56
Category: Article
ISSN: 0013-4686
DOI: 10.1016/j.electacta.2011.08.023

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