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Electrode geometries for dielectrophoretic levitation

โœ Scribed by T.B. Jones; M.J. McCarthy

Publisher
Elsevier Science
Year
1981
Tongue
French
Weight
603 KB
Volume
11
Category
Article
ISSN
0304-3886

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Large area multilayered electrode arrays
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A technique is presented for the fabrication of large-area (20x20mm) multilayered electrode structures with 10p.m feature size. This technique has been used in the fabrication of 1000-electrode arrays powered by a series of interconnected bus-bars with quadrature-phased AC power supplies. These elec