✦ LIBER ✦
Electrode assembly and plasma processing chamber utilizing thermally conductive gasket and O-rings
- Publisher
- Elsevier Science
- Year
- 2009
- Tongue
- English
- Weight
- 73 KB
- Volume
- 2009
- Category
- Article
- ISSN
- 1350-4789
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✦ Synopsis
This invention relates to a seal particularly intended for connecting together two fluid or gas flow ducts. It includes a sliding member located between the male and female sections of the join. The sliding member includes a stack of at least two layers of an inter-metal material that prevents any spread of a crack from one layer to the next.