✦ LIBER ✦
Electrochemically induced asymmetrical etching in InAlAs/InGaAs heterostructures for MODFET gate-groove fabrication
✍ Scribed by D. Xu; T. Enoki; T. Suemitsu; Y. Umeda; H. Yokoyama; Y. Ishii
- Book ID
- 107457725
- Publisher
- Springer US
- Year
- 1998
- Tongue
- English
- Weight
- 698 KB
- Volume
- 27
- Category
- Article
- ISSN
- 0361-5235
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