✦ LIBER ✦
Electrochemical test for silicon surface contamination by copper traces in HF, HF+HCl and HF+NH 4 F dilute solutions
✍ Scribed by Bertagna, Valérie; Rouelle, François; Erre, René; Chemla, Marius
- Book ID
- 121362625
- Publisher
- Institute of Physics
- Year
- 2000
- Tongue
- English
- Weight
- 89 KB
- Volume
- 15
- Category
- Article
- ISSN
- 0268-1242
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