✦ LIBER ✦
Electrochemical potential measurement and finite element structure analysis of Si wafer surface under mechanical stress
✍ Scribed by Sakata, Kaoruho; Homma, Takayuki
- Book ID
- 121801084
- Publisher
- Elsevier Science
- Year
- 2012
- Tongue
- English
- Weight
- 384 KB
- Volume
- 25
- Category
- Article
- ISSN
- 1388-2481
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