Electrochemical Microsystem Technologies (New Trends in Electro Chemical Technology, 2)

✍ Scribed by J. Walter Schultze, Tetsuya Osaka, Madhav Datta

• Publisher: CRC Press
• Year: 2002
• Tongue: English
• Leaves: 588
• Edition: 1
• Category: Library

✦ Synopsis

Driven by the electronics industry, electrochemical technology has rapidly evolved, finding increasing applications in microelectronics, batteries, sensors, materials science, industrial fabrication, corrosion, microbiology, neurobiology and medicine. Electrochemical Microsystem Technologies provides an overview of the technological status; the development of micropatternings and micro-biosensors; and the applications of micropower with electrochemical microsystems.This book covers a wide spectrum of issues ranging from fundamental electrochemical processes to their applications in micro- and nanofabrication, microanalyses, microsensing, and their interaction with inorganic surfaces and biological systems. The editors provide comprehensive background to unique processes, such as the technological development of miniaturization, microfabrication, thin film deposition, etching, cleaning, planarization, and silicon processing technologies to introduce a wide range of applications in context. More than 40 internationally recognized industry, research, and medical experts provide insight on the current status and future trends in their fields. They also highlight the impact of applying electrochemical microsystem technologies on industries such as storage and packaging; microelectronics, sensors, and portable electronics; machining, polishing, anodization, and plating technologies in heavy industries; biosensing, biological implant technology, and neurobiology; and cross-disciplinary integrated systems.Electrochemical Microsystem Technologies is a valuable reference for graduate/postgraduate students, technologists, and researchers working in the field of electrochemical technology.

✦ Table of Contents

Book Cover......Page 1
Half-Title......Page 2
Series-Title......Page 3
Title......Page 4
Copyright......Page 5
Contents......Page 6
Editorial board......Page 12
Contributors......Page 13
Preface to the series......Page 16
Preface......Page 18
Part I Fundamentals......Page 20
1 Electrochemical microsystem technologies......Page 22
2 Application for homogenous electrochemistry......Page 51
3 Fundamentals of scanning electrochemical microscopy......Page 85
4 Electrochemical microcells and surface analysis......Page 123
5 Application of optical micro-methods and lasers in electrochemistry......Page 141
6 Nucleation and growth in microsystem technology......Page 175
Part II Micropatterning......Page 204
7 High resolution lithography......Page 206
8 Advanced plating technology for electronics packaging......Page 243
9 Micro-electroforming of miniaturized devices for chemical applications......Page 264
Part III Integration of systems......Page 288
10 Capacitors and micropower systems......Page 290
11 Batteries for micropower applications......Page 305
12 Micro flow systems for chemical and biochemical applications......Page 340
13 Corrosion of microsystems......Page 348
Part IV Microanalysis and microsensors......Page 388
14 Electrochemical microanalysis......Page 390
15 Novel approaches to design silicon-based field-effect sensors......Page 403
16 Miniaturization of biosensors......Page 428
17 Scanning probe microscopy as an analysis tool......Page 448
18 Microelectrode techniques for characterization of advanced materials for battery and sensor applications......Page 484
Part V Biological systems......Page 502
19 Microsystems for biosensing nucleic acids and immuno proteins......Page 504
20 New microelectrode arrays for biosensing and membrane electroporation......Page 531
21 Multi-barrelled ion-selective microelectrodes......Page 545
22 Nerve cells and lipid vesicles on silicon chips-considerations on ionelectroic sensors......Page 560
Index......Page 580