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Electrochemical machining: new possibilities for micromachining

✍ Scribed by B Bhattacharyya; S Mitra; A.K Boro


Book ID
108457120
Publisher
Elsevier Science
Year
2002
Tongue
English
Weight
155 KB
Volume
18
Category
Article
ISSN
0736-5845

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A miniaturized electrochemical flow cell was fabricated on a silicon substrate using micromachining techniques, including photolithography, vacuum deposition, anisotropic etching, and fusion bonding. The flow cell consisted of a glass plate with gold electrodes, a silicon chip with a V-shaped groove