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Electro-mechanical coupling analysis of MEMS structures by boundary element method

โœ Scribed by Zhang Kai; Cui Yunjum; Xiong Chunyang; Wang Congshun; Fang Jing

Publisher
The Chinese Society of Theoretical and Applied Mechanics; Institute of Mechanics, Chinese Academy of Sciences
Year
2004
Tongue
English
Weight
521 KB
Volume
20
Category
Article
ISSN
0567-7718

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