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Electrically induced structure formation and pattern transfer

✍ Scribed by Steiner, Ullrich; Schäffer, Erik; Thurn-Albrecht, Thomas; Russell, Thomas P.

Book ID
109767711
Publisher
Nature Publishing Group
Year
2000
Tongue
English
Weight
383 KB
Volume
403
Category
Article
ISSN
0028-0836

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## Abstract Electrically induced patterning process, as a novel micro‐ or nano‐structuring approach for fabrication of various micro‐ or nano‐systems, is usually implemented by applying a voltage to an electrode pair consisting of a patterned or non‐patterned template and a polymer‐coated substrate