✦ LIBER ✦
Electrical properties of thin carbon films obtained by r.f. methane decomposition on an r.f.-powered negatively self-biased electrode
✍ Scribed by Z. Haś; S. Mitura; M. Cłapa; J. Szmidt
- Publisher
- Elsevier Science
- Year
- 1986
- Tongue
- English
- Weight
- 295 KB
- Volume
- 136
- Category
- Article
- ISSN
- 0040-6090
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