✦ LIBER ✦
Electrical properties of Si p+-n junctions for sub-0.25 μm CMOS fabricated by Ga FIB implantation
✍ Scribed by Mogul, H.C.; Steckl, A.J.; Ganin, E.
- Book ID
- 114535617
- Publisher
- IEEE
- Year
- 1993
- Tongue
- English
- Weight
- 749 KB
- Volume
- 40
- Category
- Article
- ISSN
- 0018-9383
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