✦ LIBER ✦
Electrical properties of Si heavily implanted with boron molecular ions: G Fuse et al, J Appl Phys, 53 (5), 1982, 3650–3653
- Publisher
- Elsevier Science
- Year
- 1983
- Tongue
- English
- Weight
- 176 KB
- Volume
- 33
- Category
- Article
- ISSN
- 0042-207X
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