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Electrical properties of planar rf discharges for dry etching

✍ Scribed by van Roosmalen, A. J.; van den Hoek, W. G. M.; Kalter, H.

Book ID
118138109
Publisher
American Institute of Physics
Year
1985
Tongue
English
Weight
744 KB
Volume
58
Category
Article
ISSN
0021-8979

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The electrical characterisation of radio-frequency (rf ) discharges lead to a better understanding of the plasma processes, since their electrical properties are directly related to microscopic discharge properties. In this paper, we present a new method to obtain, simultaneously, discharge complex