Electrical properties of metal–ferroelectric–insulator–semiconductor using sol–gel derived SrBi2Ta2O9 film and ultra-thin Si3N4 buffer layer

✍ Scribed by Chia-Hsing Huang; Tseung-Yuen Tseng; Chao-Hsin Chien; Ming-Jui Yang; Ching-Chich Leu; Ting-Chang Chang; Po-Tsun Liu; Tiao-Yuan Huang

• Book ID: 114085523
• Publisher: Elsevier Science
• Year: 2002
• Tongue: English
• Weight: 972 KB
• Volume: 420-421
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/s0040-6090(02)00939-2