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Electrical properties of amorphous tantalum pentoxide thin films on silicon

✍ Scribed by Oehrlein, G. S.; Reisman, A.

Book ID: 121298779
Publisher: American Institute of Physics
Year: 1983
Tongue: English
Weight: 804 KB
Volume: 54
Category: Article
ISSN: 0021-8979
DOI: 10.1063/1.331880

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