✦ LIBER ✦
Electrical properties of 6.3 nm RF oxygen plasma oxide grown near room temperature with in situ dry cleaning of Si surface
✍ Scribed by R.K Chanana; H.N Upadhyay; R Dwivedi; S.K Srivastava
- Publisher
- Elsevier Science
- Year
- 1995
- Tongue
- English
- Weight
- 684 KB
- Volume
- 38
- Category
- Article
- ISSN
- 0038-1101
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