✦ LIBER ✦
Electrical properties and thermal stability of MOCVD grown Ru gate electrodes for advanced CMOS technology
✍ Scribed by M. Ťapajna; K. Hušeková; D. Machajdík; A.P. Kobzev; T. Schram; R. Lupták; L. Harmatha; K. Fröhlich
- Publisher
- Elsevier Science
- Year
- 2006
- Tongue
- English
- Weight
- 235 KB
- Volume
- 83
- Category
- Article
- ISSN
- 0167-9317
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