✦ LIBER ✦
Electrical properties and their thermal stability for silicon nitride films prepared by plasma-enhanced deposition: Masahiko Maeda and Yoshinobu Arita, J Appl Phys, 53 (10), 1982, 6852–6856
- Publisher
- Elsevier Science
- Year
- 1985
- Tongue
- English
- Weight
- 148 KB
- Volume
- 35
- Category
- Article
- ISSN
- 0042-207X
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