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Electrical properties and stabilization of sputtered films by inert gas precipitation

✍ Scribed by B Navinŝek; T Žabrak

Publisher: Elsevier Science
Year: 1976
Tongue: English
Weight: 437 KB
Volume: 36
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(76)90394-1

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