✦ LIBER ✦
Electrical properties and grain size of phosphorus in situ doped and cw laser annealed polycrystalline silicon films: T. Ternisien d'Ouville et al,J Appl Phys, 53 (7), 1982, 5086–5092
- Publisher
- Elsevier Science
- Year
- 1985
- Tongue
- English
- Weight
- 180 KB
- Volume
- 35
- Category
- Article
- ISSN
- 0042-207X
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