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Electrical properties and atomic distribution studies in ion implanted InP

✍ Scribed by K.V. Vaidyanathan; C.L. Anderson; H.L. Dunlap; D.E. Holmes

Publisher: Elsevier Science
Year: 1981
Weight: 308 KB
Volume: 182-183
Category: Article
ISSN: 0029-554X
DOI: 10.1016/0029-554x(81)90788-6

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