Electrical passivation by hydrogen plasma treatment of transition metal impurities in germanium

✍ Scribed by J. Lauwaert; J. Van Gheluwe; P. Clauws

• Publisher: Elsevier Science
• Year: 2008
• Tongue: English
• Weight: 444 KB
• Volume: 11
• Category: Article
• ISSN: 1369-8001
• DOI: 10.1016/j.mssp.2008.09.010