Electrical Noise in MEMS Capacitive Elements Resulting From Environmental Mechanical Vibrations in Harsh Environments

✍ Scribed by Dean, R.N.; Anderson, A.; Reeves, S.J.; Flowers, G.T.; Hodel, A.S.

• Book ID: 117919373
• Publisher: IEEE
• Year: 2011
• Tongue: English
• Weight: 540 KB
• Volume: 58
• Category: Article
• ISSN: 1932-4529
• DOI: 10.1109/tie.2010.2076310