✦ LIBER ✦
Electrical measurements on ion-implanted LPCVD polycrystalline silicon films : Ruey-Shing Huang, Chin-Hsiung Cheng, J. C. Liu, M. K. Lee and C. T. Chen. Solid-St. Electron.26 (7), 657 (1983)
- Publisher
- Elsevier Science
- Year
- 1984
- Tongue
- English
- Weight
- 127 KB
- Volume
- 24
- Category
- Article
- ISSN
- 0026-2714
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