✦ LIBER ✦
Electrical Measurements and Optical Emission Spectroscopy of Silicon–Carbon Alloys Grown by PACVD: Correlation with Film Microstructure
✍ Scribed by L. Thomas; E. Tomasella; J.M. Badie; R. Berjoan; M. Ducarroir
- Publisher
- John Wiley and Sons
- Year
- 2003
- Tongue
- English
- Weight
- 443 KB
- Volume
- 9
- Category
- Article
- ISSN
- 0948-1907
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