Electrical measurement of silicon film and oxide thicknesses in partially depleted SOI technologies : B. M. Tenbroek, W. Redman-White, M.S.L. Lee and M.J. Uren. Solid-State Electronics, 1996, 39(7), 1011

• Book ID: 108362278
• Publisher: Elsevier Science
• Year: 1997
• Tongue: English
• Weight: 113 KB
• Volume: 37
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/s0026-2714(97)82541-3