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Electrical insulating properties and thermal stability of r.f.-sputtered alumina coatings

✍ Scribed by T.A. Mäntylä; P.J.M. Vuoristo; A.K. Telama; P.O. Kettunen

Publisher: Elsevier Science
Year: 1985
Tongue: English
Weight: 418 KB
Volume: 126
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(85)90173-7

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