✦ LIBER ✦
Electrical conduction in silicon nitride thin films under 15 keV He+ irradiation
✍ Scribed by Gunkel, C. ;Schalch, D. ;Scharmann, A.
- Publisher
- John Wiley and Sons
- Year
- 1983
- Tongue
- English
- Weight
- 222 KB
- Volume
- 75
- Category
- Article
- ISSN
- 0031-8965
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