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Electrical characterization of the TiN/Ti/n+Si (and p +Si) interfaces by means of a circular resistor test structure

✍ Scribed by Caprile, C.; Scorzoni, A.; Vanzi, M.

Book ID
114534467
Publisher
IEEE
Year
1991
Tongue
English
Weight
348 KB
Volume
38
Category
Article
ISSN
0018-9383

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