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Electrical characterization of phosphorus-doped n-type homoepitaxial diamond layers by Schottky barrier diodes

โœ Scribed by Suzuki, Mariko; Yoshida, Hiroaki; Sakuma, Naoshi; Ono, Tomio; Sakai, Tadashi; Koizumi, Satoshi


Book ID
121482241
Publisher
American Institute of Physics
Year
2004
Tongue
English
Weight
224 KB
Volume
84
Category
Article
ISSN
0003-6951

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## Abstract Electron paramagnetic resonance technique has been applied to identify the microscopic origin of the nโ€type conductivity in phosphorusโ€doped {111}โ€homoepitaxial diamond films grown by chemical vapor deposition. The NIMSโ€1 center having the __D__ ~2d~ symmetry with __g__ ~||~ = 1.9983, _