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Electrical characterization of MOS structures fabricated on SF6 and SF6 + C2CIF5 reactive ion etched silicon
✍ Scribed by E. Castán; J. Vicente; J. Barbolla; E. Cabruja; E. Lora-Tamayo
- Book ID
- 113283607
- Publisher
- Elsevier Science
- Year
- 1993
- Tongue
- English
- Weight
- 300 KB
- Volume
- 80-81
- Category
- Article
- ISSN
- 0168-583X
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