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Electrical characterization of laser machined and metallized vias in AlN with thick film interconnect

✍ Scribed by Lumpp, J.K.; Raman, S.

Book ID: 114560652
Publisher: IEEE
Year: 1998
Weight: 231 KB
Volume: 21
Category: Article
ISSN: 1083-4400
DOI: 10.1109/3476.681388

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