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Electrical characterization of directly deposited La-Sc oxides complex for gate insulator application

✍ Scribed by T. Kawanago; K. Tachi; J. Song; K. Kakushima; P. Ahmet; K. Tsutsui; N. Sugii; T. Hattori; H. Iwai


Publisher
Elsevier Science
Year
2007
Tongue
English
Weight
360 KB
Volume
84
Category
Article
ISSN
0167-9317

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