Electrical characteristics of double electrode r.f. sputtering systems. 1. The discharge : G. N. Jackson. Vacuum 21, No. 11, p. 533

• Publisher: Elsevier Science
• Year: 1972
• Tongue: English
• Weight: 114 KB
• Volume: 11
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(72)90564-1