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Electrical behaviour of SiOxNy thin films and correlation with structural defects

โœ Scribed by F. Rebib; E. Tomasella; S. Aida; M. Dubois; J. Cellier; M. Jacquet


Book ID
103817909
Publisher
Elsevier Science
Year
2006
Tongue
English
Weight
260 KB
Volume
252
Category
Article
ISSN
0169-4332

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