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Electrical behaviour of fresh and stored porous silicon films

✍ Scribed by M.L Ciurea; I Baltog; M Lazar; V Iancu; S Lazanu; E Pentia


Book ID
108389375
Publisher
Elsevier Science
Year
1998
Tongue
English
Weight
250 KB
Volume
325
Category
Article
ISSN
0040-6090

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Microhardness of porous silicon films an
✍ S.P. Duttagupta; X.L. Chen; S.A. Jenekhe; P.M. Fauchet πŸ“‚ Article πŸ“… 1997 πŸ› Elsevier Science 🌐 English βš– 459 KB

## by D.J. Lockwood) Microhardness measurements have been performed on porous silicon (Psi) films. The dependence of the hardness on porosity, morphology and the underlying silicon substrate has been established. A model which determines the intrinsic film hardness has been developed and experimen