✦ LIBER ✦
Electrical and thermal properties of μm-scaled contacts with Ti/TiN-barrier to heavily doped silicon
✍ Scribed by W. W. Keller
- Publisher
- Springer
- Year
- 1993
- Tongue
- English
- Weight
- 487 KB
- Volume
- 56
- Category
- Article
- ISSN
- 1432-0630
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