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Electrical and surface properties of indium tin oxide (ITO) films by pulsed DC magnetron sputtering for organic light emitting diode as anode material

✍ Scribed by Eunkyoung Nam; Young-Hun Kang; Dong-Jin Son; Donggeun Jung; Sung-Jei Hong; Young Sung Kim

Book ID: 108278674
Publisher: Elsevier Science
Year: 2010
Tongue: English
Weight: 676 KB
Volume: 205
Category: Article
ISSN: 0257-8972
DOI: 10.1016/j.surfcoat.2010.06.060

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## Abstract Indium–tin‐oxide (ITO) deposited by conventional capacitive RF magnetron sputtering (rf MS), DC facing target sputtering (dc FTS) and two postannealed samples of these were compared. Comparison of the ITOs aimed at investigating the surface and microstructure effect on the electrical an