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Electrical and optical properties of copper-complexes thin films grown by the vacuum thermal evaporation technique

✍ Scribed by Sánchez-Vergara, M.E.; Rivera, M.; Alonso-Huitrón, J.C.; Rodriguez, A.; Álvarez-Bada, J.R.


Book ID
121345689
Publisher
Elsevier Science
Year
2013
Tongue
English
Weight
821 KB
Volume
138
Category
Article
ISSN
0254-0584

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In this article, the conduction mechanisms of metal-oxide-semiconductor with vacuum annealed Lanthana (La 2 O 3 ) oxide film are investigated. Lanthana films with thicknesses of 3.5, 4.7, and 11 nm were deposited by E-beam evaporation on n-Si (100), and annealed at various temperatures (300-500 8C)