Electrical analysis of mechanical stress induced by STI in short MOSFETs using externally applied stress

✍ Scribed by Gallon, C.; Reimbold, G.; Ghibaudo, G.; Bianchi, R.A.; Gwoziecki, R.; Orain, S.; Robilliart, E.; Raynaud, C.; Dansas, H.

• Book ID: 114617500
• Publisher: IEEE
• Year: 2004
• Tongue: English
• Weight: 931 KB
• Volume: 51
• Category: Article
• ISSN: 0018-9383
• DOI: 10.1109/ted.2004.831358