Electrical activation in boron doped polycrystalline Si formed by sequential lateral solidification

✍ Scribed by Won-Eui Hong; Deok Hoi Kim; Chi Woo Kim; Jae-Sang Ro

• Book ID: 113937200
• Publisher: Elsevier Science
• Year: 2011
• Tongue: English
• Weight: 873 KB
• Volume: 520
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/j.tsf.2011.08.018